SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
一种III族氮化物衬底的生产设备
刘祥林; 焦春美
2006-07-05
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2004-12-23
Language中文
Application Number200410098993
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3437
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
刘祥林,焦春美. 一种III族氮化物衬底的生产设备[P]. 2006-07-05.
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