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title: 竖直式离子注入碳化硅高温退火装置
author: 孙国胜;  王雷;  赵万顺
metadata_47: 2005-11-30
Appears in Collections:半导体研究所机构知识库_专利

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孙国胜;王雷;赵万顺,竖直式离子注入碳化硅高温退火装置 ,CN200420092863.8,20040922
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