硅基量子器件工艺优化及性能提升研究

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	硅基量子器件工艺优化及性能提升研究
	李泽
Subtype	硕士
	2024-05
Degree Grantor	中国科学院大学
Place of Conferral	中国科学院半导体研究所
Language	中文
Date Available	2024-06
Document Type	学位论文
Identifier	http://ir.semi.ac.cn/handle/172111/31742
Collection	中国科学院半导体研究所
Recommended Citation GB/T 7714	李泽. 硅基量子器件工艺优化及性能提升研究[D]. 中国科学院半导体研究所. 中国科学院大学,2024.

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