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title: 一种竖直式高温大功率碳化硅外延材料制造装置
author: 孙国胜;  王雷;  赵万顺;  曾一平;  李晋闽
metadata_47: 2006-1-11
Appears in Collections:半导体研究所机构知识库_专利

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Recommended Citation:
孙国胜;王雷;赵万顺;曾一平;李晋闽,一种竖直式高温大功率碳化硅外延材料制造装置 ,CN200410069190.9,20040707
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