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title: 湿法腐蚀两步法制备超薄柔性硅衬底的腐蚀工艺
author: 王晓峰;  曾一平;  孙国胜;  黄风义;  王雷;  赵万顺
metadata_47: 2005-11-16
Appears in Collections:半导体研究所机构知识库_专利

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王晓峰;曾一平;孙国胜;黄风义;王雷;赵万顺,湿法腐蚀两步法制备超薄柔性硅衬底的腐蚀工艺 ,CN200410037736.2,20040510
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