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Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching
Lihao Wang;   Meijie Liu ;   Junyuan Zhao ;   Jicong Zhao ;  Yinfang Zhu;  Jinling Yang;   Fuhua Yang
2020
Source PublicationMICROMACHINES
Volume11Issue:7Pages:638
Indexed BySCI
Language英语
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/30469
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Lihao Wang; Meijie Liu ; Junyuan Zhao ; Jicong Zhao ;Yinfang Zhu;Jinling Yang; Fuhua Yang. Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching[J]. MICROMACHINES,2020,11(7):638.
APA Lihao Wang; Meijie Liu ; Junyuan Zhao ; Jicong Zhao ;Yinfang Zhu;Jinling Yang; Fuhua Yang.(2020).Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching.MICROMACHINES,11(7),638.
MLA Lihao Wang; Meijie Liu ; Junyuan Zhao ; Jicong Zhao ;Yinfang Zhu;Jinling Yang; Fuhua Yang."Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching".MICROMACHINES 11.7(2020):638.
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