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Flexible graphene-assisted van der Waals epitaxy growth of crack-free AlN epilayer on SiC by lattice engineering
Yunyu Wang;   Shenyuan Yang;   Hongliang Chang;   Weijiang Li;   Xiufang Chend;   Rui Hou;   Jianchang Yan;   Xiaoyan Yi;   Junxi Wang;   Tongbo Wei
2020
Source PublicationAPPLIED SURFACE SCIENCE
Volume520Pages:146358
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/30437
Collection中科院半导体照明研发中心
Recommended Citation
GB/T 7714
Yunyu Wang; Shenyuan Yang; Hongliang Chang; Weijiang Li; Xiufang Chend; Rui Hou; Jianchang Yan; Xiaoyan Yi; Junxi Wang; Tongbo Wei. Flexible graphene-assisted van der Waals epitaxy growth of crack-free AlN epilayer on SiC by lattice engineering[J]. APPLIED SURFACE SCIENCE,2020,520:146358.
APA Yunyu Wang; Shenyuan Yang; Hongliang Chang; Weijiang Li; Xiufang Chend; Rui Hou; Jianchang Yan; Xiaoyan Yi; Junxi Wang; Tongbo Wei.(2020).Flexible graphene-assisted van der Waals epitaxy growth of crack-free AlN epilayer on SiC by lattice engineering.APPLIED SURFACE SCIENCE,520,146358.
MLA Yunyu Wang; Shenyuan Yang; Hongliang Chang; Weijiang Li; Xiufang Chend; Rui Hou; Jianchang Yan; Xiaoyan Yi; Junxi Wang; Tongbo Wei."Flexible graphene-assisted van der Waals epitaxy growth of crack-free AlN epilayer on SiC by lattice engineering".APPLIED SURFACE SCIENCE 520(2020):146358.
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