Knowledge Management System Of Institute of Semiconductors,CAS
一种制备半导体衬底的方法 | |
杨沁清; 李成; 欧海燕; 王红杰; 王启明 | |
2001-04-04 | |
Date Available | 2009-06-04 ; 2009-06-11 |
Subtype | 发明 |
Application Date | 1999-09-27 |
Language | 中文 |
Application Number | CN99119469.1 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/3033 |
Collection | 中国科学院半导体研究所(2009年前) |
Recommended Citation GB/T 7714 | 杨沁清,李成,欧海燕,等. 一种制备半导体衬底的方法[P]. 2001-04-04. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
99119469.pdf(287KB) | 限制开放 | -- | Application Full Text |
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