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一种制备半导体衬底的方法
杨沁清; 李成; 欧海燕; 王红杰; 王启明
2001-04-04
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date1999-09-27
Language中文
Application NumberCN99119469.1
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3033
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 杨沁清,李成,欧海燕,等. 一种制备半导体衬底的方法[P]. 2001-04-04.
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99119469.pdf（287KB） 限制开放--Application Full Text
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