SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
一种制备半导体衬底的方法
杨沁清; 李成; 欧海燕; 王红杰; 王启明
2001-04-04
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date1999-09-27
Language中文
Application NumberCN99119469.1
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3033
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
杨沁清,李成,欧海燕,等. 一种制备半导体衬底的方法[P]. 2001-04-04.
Files in This Item:
File Name/Size DocType Version Access License
99119469.pdf(287KB) 限制开放--Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[杨沁清]'s Articles
[李成]'s Articles
[欧海燕]'s Articles
Baidu academic
Similar articles in Baidu academic
[杨沁清]'s Articles
[李成]'s Articles
[欧海燕]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[杨沁清]'s Articles
[李成]'s Articles
[欧海燕]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.