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Structural characterization of AlN (11-22) films prepared by sputtering and thermal annealing on m-plane sapphire substrates
Qiong Feng;   Yujie Ai;   Zhe Liu ;   Zhiguo Yu ;   Kun Yang;   Boyu Dong;   Bingliang Guo;   Yun Zhang
2020
Source PublicationSUPERLATTICES AND MICROSTRUCTURES
Volume141Pages:106493
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/30312
Collection固态光电信息技术实验室
Recommended Citation
GB/T 7714
Qiong Feng; Yujie Ai; Zhe Liu ; Zhiguo Yu ; Kun Yang; Boyu Dong; Bingliang Guo; Yun Zhang. Structural characterization of AlN (11-22) films prepared by sputtering and thermal annealing on m-plane sapphire substrates[J]. SUPERLATTICES AND MICROSTRUCTURES,2020,141:106493.
APA Qiong Feng; Yujie Ai; Zhe Liu ; Zhiguo Yu ; Kun Yang; Boyu Dong; Bingliang Guo; Yun Zhang.(2020).Structural characterization of AlN (11-22) films prepared by sputtering and thermal annealing on m-plane sapphire substrates.SUPERLATTICES AND MICROSTRUCTURES,141,106493.
MLA Qiong Feng; Yujie Ai; Zhe Liu ; Zhiguo Yu ; Kun Yang; Boyu Dong; Bingliang Guo; Yun Zhang."Structural characterization of AlN (11-22) films prepared by sputtering and thermal annealing on m-plane sapphire substrates".SUPERLATTICES AND MICROSTRUCTURES 141(2020):106493.
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