SEMI OpenIR  > 中科院半导体材料科学重点实验室
Design and fabrication of a SiN-Si dual-layer optical phased array chip
Pengfei Wang;   Guangzhen Luo;   Yang Xu;   Yajie Li;   Yanmei Su;   Jianbin Ma;   Ruiting Wang;   Zhengxia Yang;   Xuliang Zhou;   Yejin Zhang;   Jiaoqing Pan
2020
Source PublicationPHOTONICS RESEARCH
Volume8Issue:6Pages:912-919
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/30261
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
Pengfei Wang; Guangzhen Luo; Yang Xu; Yajie Li; Yanmei Su; Jianbin Ma; Ruiting Wang; Zhengxia Yang; Xuliang Zhou; Yejin Zhang; Jiaoqing Pan. Design and fabrication of a SiN-Si dual-layer optical phased array chip[J]. PHOTONICS RESEARCH,2020,8(6):912-919.
APA Pengfei Wang; Guangzhen Luo; Yang Xu; Yajie Li; Yanmei Su; Jianbin Ma; Ruiting Wang; Zhengxia Yang; Xuliang Zhou; Yejin Zhang; Jiaoqing Pan.(2020).Design and fabrication of a SiN-Si dual-layer optical phased array chip.PHOTONICS RESEARCH,8(6),912-919.
MLA Pengfei Wang; Guangzhen Luo; Yang Xu; Yajie Li; Yanmei Su; Jianbin Ma; Ruiting Wang; Zhengxia Yang; Xuliang Zhou; Yejin Zhang; Jiaoqing Pan."Design and fabrication of a SiN-Si dual-layer optical phased array chip".PHOTONICS RESEARCH 8.6(2020):912-919.
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