SEMI OpenIR  > 半导体集成技术工程研究中心
Experimental and theoretical study on device-processing-incorporated fluorine in AlGaN/GaN heterostructures
Jianxing Xu;   Xiaodong Tong;   Shiyong Zhang;   Zhe Cheng;   Lian Zhang;   Penghui Zheng;   Feng-Xiang Chen;   Rong Wang;   Yun Zhang;   Wei Tan
2020
Source PublicationAIP ADVANCES
Volume10Issue:6Pages:065122
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/30211
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Jianxing Xu; Xiaodong Tong; Shiyong Zhang; Zhe Cheng; Lian Zhang; Penghui Zheng; Feng-Xiang Chen; Rong Wang; Yun Zhang; Wei Tan. Experimental and theoretical study on device-processing-incorporated fluorine in AlGaN/GaN heterostructures[J]. AIP ADVANCES,2020,10(6):065122.
APA Jianxing Xu; Xiaodong Tong; Shiyong Zhang; Zhe Cheng; Lian Zhang; Penghui Zheng; Feng-Xiang Chen; Rong Wang; Yun Zhang; Wei Tan.(2020).Experimental and theoretical study on device-processing-incorporated fluorine in AlGaN/GaN heterostructures.AIP ADVANCES,10(6),065122.
MLA Jianxing Xu; Xiaodong Tong; Shiyong Zhang; Zhe Cheng; Lian Zhang; Penghui Zheng; Feng-Xiang Chen; Rong Wang; Yun Zhang; Wei Tan."Experimental and theoretical study on device-processing-incorporated fluorine in AlGaN/GaN heterostructures".AIP ADVANCES 10.6(2020):065122.
Files in This Item:
File Name/Size DocType Version Access License
293-Experimental and(1403KB)期刊论文作者接受稿限制开放CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Jianxing Xu; Xiaodong Tong; Shiyong Zhang; Zhe Cheng; Lian Zhang; Penghui Zheng; Feng-Xiang Chen; Rong Wang; Yun Zhang; Wei Tan]'s Articles
Baidu academic
Similar articles in Baidu academic
[Jianxing Xu; Xiaodong Tong; Shiyong Zhang; Zhe Cheng; Lian Zhang; Penghui Zheng; Feng-Xiang Chen; Rong Wang; Yun Zhang; Wei Tan]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Jianxing Xu; Xiaodong Tong; Shiyong Zhang; Zhe Cheng; Lian Zhang; Penghui Zheng; Feng-Xiang Chen; Rong Wang; Yun Zhang; Wei Tan]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.