A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer | |
Jian Yang; Meng Zhang; Chaowei Si; Guowei Han; Jin Ning; Fuhua Yang; Xiaodong Wang | |
2019 | |
Source Publication | Journal of Microelectromechanical Systems
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Volume | 28Issue:5Pages:776-781 |
Indexed By | SCI |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/29845 |
Collection | 半导体集成技术工程研究中心 |
Recommended Citation GB/T 7714 | Jian Yang;Meng Zhang;Chaowei Si;Guowei Han;Jin Ning;Fuhua Yang;Xiaodong Wang. A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer[J]. Journal of Microelectromechanical Systems,2019,28(5):776-781. |
APA | Jian Yang;Meng Zhang;Chaowei Si;Guowei Han;Jin Ning;Fuhua Yang;Xiaodong Wang.(2019).A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer.Journal of Microelectromechanical Systems,28(5),776-781. |
MLA | Jian Yang;Meng Zhang;Chaowei Si;Guowei Han;Jin Ning;Fuhua Yang;Xiaodong Wang."A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer".Journal of Microelectromechanical Systems 28.5(2019):776-781. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
A T-Shape Aluminum N(2407KB) | 期刊论文 | 作者接受稿 | 限制开放 | CC BY-NC-SA | Application Full Text |
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