| A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer | |
| Jian Yang; Meng Zhang; Chaowei Si; Guowei Han; Jin Ning; Fuhua Yang; Xiaodong Wang | |
| 2019 | |
| Source Publication | Journal of Microelectromechanical Systems
 |
| Volume | 28Issue:5Pages:776-781 |
| Indexed By | SCI |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/29845 |
| Collection | 半导体集成技术工程研究中心 |
| Recommended Citation GB/T 7714 | Jian Yang;Meng Zhang;Chaowei Si;Guowei Han;Jin Ning;Fuhua Yang;Xiaodong Wang. A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer[J]. Journal of Microelectromechanical Systems,2019,28(5):776-781. |
| APA | Jian Yang;Meng Zhang;Chaowei Si;Guowei Han;Jin Ning;Fuhua Yang;Xiaodong Wang.(2019).A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer.Journal of Microelectromechanical Systems,28(5),776-781. |
| MLA | Jian Yang;Meng Zhang;Chaowei Si;Guowei Han;Jin Ning;Fuhua Yang;Xiaodong Wang."A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer".Journal of Microelectromechanical Systems 28.5(2019):776-781. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| A T-Shape Aluminum N（2407KB） | 期刊论文 | 作者接受稿 | 限制开放 | CC BY-NC-SA | Application Full Text | |
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