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A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer
Jian Yang;  Meng Zhang;  Chaowei Si;  Guowei Han;  Jin Ning;  Fuhua Yang;  Xiaodong Wang
2019
Source PublicationJournal of Microelectromechanical Systems
Volume28Issue:5Pages:776-781
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29845
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Jian Yang;Meng Zhang;Chaowei Si;Guowei Han;Jin Ning;Fuhua Yang;Xiaodong Wang. A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer[J]. Journal of Microelectromechanical Systems,2019,28(5):776-781.
APA Jian Yang;Meng Zhang;Chaowei Si;Guowei Han;Jin Ning;Fuhua Yang;Xiaodong Wang.(2019).A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer.Journal of Microelectromechanical Systems,28(5),776-781.
MLA Jian Yang;Meng Zhang;Chaowei Si;Guowei Han;Jin Ning;Fuhua Yang;Xiaodong Wang."A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer".Journal of Microelectromechanical Systems 28.5(2019):776-781.
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