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A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
Jian Yang;   Meng Zhang;   Yurong He;   Yan Su ;   Guowei Han ;   Chaowei Si ;   Jin Ning;   Fuhua Yang ;   Xiaodong Wang
2019
Source PublicationMicromachines
Volume10Issue:9Pages:589
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29844
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Jian Yang; Meng Zhang; Yurong He; Yan Su ; Guowei Han ; Chaowei Si ; Jin Ning; Fuhua Yang ; Xiaodong Wang. A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer[J]. Micromachines,2019,10(9):589.
APA Jian Yang; Meng Zhang; Yurong He; Yan Su ; Guowei Han ; Chaowei Si ; Jin Ning; Fuhua Yang ; Xiaodong Wang.(2019).A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer.Micromachines,10(9),589.
MLA Jian Yang; Meng Zhang; Yurong He; Yan Su ; Guowei Han ; Chaowei Si ; Jin Ning; Fuhua Yang ; Xiaodong Wang."A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer".Micromachines 10.9(2019):589.
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