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A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope
Jian Yang;   Chaowei Si;   Guowei Han ;   Meng Zhang ;   Jin Ning;   Yongmei Zhao ;   Fuhua Yang;   Xiaodong Wang
2019
Source PublicationMICROMACHINES
Volume10Pages:244
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29843
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Jian Yang; Chaowei Si; Guowei Han ; Meng Zhang ; Jin Ning; Yongmei Zhao ; Fuhua Yang; Xiaodong Wang. A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope[J]. MICROMACHINES,2019,10:244.
APA Jian Yang; Chaowei Si; Guowei Han ; Meng Zhang ; Jin Ning; Yongmei Zhao ; Fuhua Yang; Xiaodong Wang.(2019).A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope.MICROMACHINES,10,244.
MLA Jian Yang; Chaowei Si; Guowei Han ; Meng Zhang ; Jin Ning; Yongmei Zhao ; Fuhua Yang; Xiaodong Wang."A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope".MICROMACHINES 10(2019):244.
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