| Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication | |
| Meng Zhang; Jian Yang; Yurong He; Fan Yang; Yongmei Zhao; Fen Xue; Guowei Han; Chaowei Si; Jin Ning | |
| 2019 | |
| Source Publication | Micromachines
 |
| Volume | 10Pages:420 |
| Indexed By | SCI |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/29763 |
| Collection | 半导体集成技术工程研究中心 |
| Recommended Citation GB/T 7714 | Meng Zhang;Jian Yang;Yurong He;Fan Yang;Yongmei Zhao;Fen Xue;Guowei Han;Chaowei Si;Jin Ning. Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication[J]. Micromachines,2019,10:420. |
| APA | Meng Zhang;Jian Yang;Yurong He;Fan Yang;Yongmei Zhao;Fen Xue;Guowei Han;Chaowei Si;Jin Ning.(2019).Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication.Micromachines,10,420. |
| MLA | Meng Zhang;Jian Yang;Yurong He;Fan Yang;Yongmei Zhao;Fen Xue;Guowei Han;Chaowei Si;Jin Ning."Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication".Micromachines 10(2019):420. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| Research on the Prot（8646KB） | 期刊论文 | 作者接受稿 | 限制开放 | CC BY-NC-SA | Application Full Text | |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment