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Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication
Meng Zhang;  Jian Yang;  Yurong He;  Fan Yang;  Yongmei Zhao;  Fen Xue;  Guowei Han;  Chaowei Si;  Jin Ning
2019
Source PublicationMicromachines
Volume10Pages:420
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29763
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Meng Zhang;Jian Yang;Yurong He;Fan Yang;Yongmei Zhao;Fen Xue;Guowei Han;Chaowei Si;Jin Ning. Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication[J]. Micromachines,2019,10:420.
APA Meng Zhang;Jian Yang;Yurong He;Fan Yang;Yongmei Zhao;Fen Xue;Guowei Han;Chaowei Si;Jin Ning.(2019).Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication.Micromachines,10,420.
MLA Meng Zhang;Jian Yang;Yurong He;Fan Yang;Yongmei Zhao;Fen Xue;Guowei Han;Chaowei Si;Jin Ning."Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication".Micromachines 10(2019):420.
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