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3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity
Zeji Chen ;   Fengxiang Wang ;   Quan Yuan ;   Xiao Kan ;   Jinling Yang ;   Jicong Zhao ;   Fuhua Yang
2019
Source PublicationSENSORS AND ACTUATORS A-PHYSICAL
Volume286Pages:123-132
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29606
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Zeji Chen ; Fengxiang Wang ; Quan Yuan ; Xiao Kan ; Jinling Yang ; Jicong Zhao ; Fuhua Yang. 3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity[J]. SENSORS AND ACTUATORS A-PHYSICAL,2019,286:123-132.
APA Zeji Chen ; Fengxiang Wang ; Quan Yuan ; Xiao Kan ; Jinling Yang ; Jicong Zhao ; Fuhua Yang.(2019).3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity.SENSORS AND ACTUATORS A-PHYSICAL,286,123-132.
MLA Zeji Chen ; Fengxiang Wang ; Quan Yuan ; Xiao Kan ; Jinling Yang ; Jicong Zhao ; Fuhua Yang."3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity".SENSORS AND ACTUATORS A-PHYSICAL 286(2019):123-132.
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