SEMI OpenIR  > 中科院半导体材料科学重点实验室
The composition and interfacial properties of annealed AlN films deposited on 4H-SiC by atomic layer deposition
Jun Chen ;   Bowen Lv ;   Feng Zhang ;   Yinshu Wang ;   Xingfang Liu ;   Guoguo Yan ;   Zhanwei Shen ;   Zhengxin Wen ;   Lei Wang ;   Wanshun Zhao ;   Guosheng Sun ;   Chao Liu ;   Yiping Zeng
2019
Source PublicationMaterials Science in Semiconductor Processing
Volume94Pages:107-115
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29561
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
Jun Chen ; Bowen Lv ; Feng Zhang ; Yinshu Wang ; Xingfang Liu ; Guoguo Yan ; Zhanwei Shen ; Zhengxin Wen ; Lei Wang ; Wanshun Zhao ; Guosheng Sun ; Chao Liu ; Yiping Zeng. The composition and interfacial properties of annealed AlN films deposited on 4H-SiC by atomic layer deposition[J]. Materials Science in Semiconductor Processing,2019,94:107-115.
APA Jun Chen ; Bowen Lv ; Feng Zhang ; Yinshu Wang ; Xingfang Liu ; Guoguo Yan ; Zhanwei Shen ; Zhengxin Wen ; Lei Wang ; Wanshun Zhao ; Guosheng Sun ; Chao Liu ; Yiping Zeng.(2019).The composition and interfacial properties of annealed AlN films deposited on 4H-SiC by atomic layer deposition.Materials Science in Semiconductor Processing,94,107-115.
MLA Jun Chen ; Bowen Lv ; Feng Zhang ; Yinshu Wang ; Xingfang Liu ; Guoguo Yan ; Zhanwei Shen ; Zhengxin Wen ; Lei Wang ; Wanshun Zhao ; Guosheng Sun ; Chao Liu ; Yiping Zeng."The composition and interfacial properties of annealed AlN films deposited on 4H-SiC by atomic layer deposition".Materials Science in Semiconductor Processing 94(2019):107-115.
Files in This Item:
File Name/Size DocType Version Access License
The composition and (3762KB)期刊论文作者接受稿限制开放CC BY-NC-SAApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Jun Chen ; Bowen Lv ; Feng Zhang ; Yinshu Wang ; Xingfang Liu ; Guoguo Yan ; Zhanwei Shen ; Zhengxin Wen ; Lei Wang ; Wanshun Zhao ; Guosheng Sun ; Chao Liu ; Yiping Zeng]'s Articles
Baidu academic
Similar articles in Baidu academic
[Jun Chen ; Bowen Lv ; Feng Zhang ; Yinshu Wang ; Xingfang Liu ; Guoguo Yan ; Zhanwei Shen ; Zhengxin Wen ; Lei Wang ; Wanshun Zhao ; Guosheng Sun ; Chao Liu ; Yiping Zeng]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Jun Chen ; Bowen Lv ; Feng Zhang ; Yinshu Wang ; Xingfang Liu ; Guoguo Yan ; Zhanwei Shen ; Zhengxin Wen ; Lei Wang ; Wanshun Zhao ; Guosheng Sun ; Chao Liu ; Yiping Zeng]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.