Knowledge Management System Of Institute of Semiconductors,CAS
| 利用光掩模板作无源对准的方法 | |
| 陈弘达; 裴为华; 唐君; 申荣铉; 孙增辉; 贾九春 | |
| 2005-08-31 | |
| Date Available | 2009-06-04 ; 2009-06-11 |
| Subtype | 发明 |
| Application Date | 2004-02-26 |
| Language | 中文 |
| Application Number | CN200410006726.2 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/2931 |
| Collection | 中国科学院半导体研究所（2009年前） |
| Recommended Citation GB/T 7714 | 陈弘达,裴为华,唐君,等. 利用光掩模板作无源对准的方法[P]. 2005-08-31. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 200410006726.pdf（301KB） | 限制开放 | -- | Application Full Text | |||
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