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Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire
Shuai Yang;  Yujie Ai;  Yun Zhang;  Zhe Cheng;  Lian Zhang;  Lifang Jia;  Boyu Dong;  Baohui Zhang;  Junxi Wang
2018
Source PublicationJournal of Micromechanics & Microengineering
Volume28Issue:8Pages:085005
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29267
Collection固态光电信息技术实验室
Recommended Citation
GB/T 7714
Shuai Yang;Yujie Ai;Yun Zhang;Zhe Cheng;Lian Zhang;Lifang Jia;Boyu Dong;Baohui Zhang;Junxi Wang. Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire[J]. Journal of Micromechanics & Microengineering,2018,28(8):085005.
APA Shuai Yang;Yujie Ai;Yun Zhang;Zhe Cheng;Lian Zhang;Lifang Jia;Boyu Dong;Baohui Zhang;Junxi Wang.(2018).Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire.Journal of Micromechanics & Microengineering,28(8),085005.
MLA Shuai Yang;Yujie Ai;Yun Zhang;Zhe Cheng;Lian Zhang;Lifang Jia;Boyu Dong;Baohui Zhang;Junxi Wang."Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire".Journal of Micromechanics & Microengineering 28.8(2018):085005.
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