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title: 气态束源炉瞬态开关控制真空装置
author: 牛智川;  倪海桥;  徐晓华;  徐应强;  张纬;  韩勤;  吴荣汉
metadata_47: 2004-11-24
Appears in Collections:半导体研究所机构知识库_专利

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牛智川;倪海桥;徐晓华;徐应强;张纬;韩勤;吴荣汉,气态束源炉瞬态开关控制真空装置 ,CN03136238.9,20030519
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