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Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
Jian Yang ;   Chaowei Si ;   Fan Yang ;   Guowei Han ;   Jin Ning ;   Fuhua Yang ;   Xiaodong Wang
2018
Source PublicationMICROMACHINES
Volume9Issue:2Pages:81
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29021
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Jian Yang ; Chaowei Si ; Fan Yang ; Guowei Han ; Jin Ning ; Fuhua Yang ; Xiaodong Wang. Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope[J]. MICROMACHINES,2018,9(2):81.
APA Jian Yang ; Chaowei Si ; Fan Yang ; Guowei Han ; Jin Ning ; Fuhua Yang ; Xiaodong Wang.(2018).Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope.MICROMACHINES,9(2),81.
MLA Jian Yang ; Chaowei Si ; Fan Yang ; Guowei Han ; Jin Ning ; Fuhua Yang ; Xiaodong Wang."Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope".MICROMACHINES 9.2(2018):81.
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