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A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing
Xiaochen Liu;  Lihao Wang;  Yinfang Zhu;  Junyuan Zhao;  Jinying Zhang;  Jinling Yang;  Fuhua Yang
2018
Source PublicationJournal of Micromechanics & Microengineering
Volume28Issue:11Pages:115003
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29018
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Xiaochen Liu;Lihao Wang;Yinfang Zhu;Junyuan Zhao;Jinying Zhang;Jinling Yang;Fuhua Yang. A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing[J]. Journal of Micromechanics & Microengineering,2018,28(11):115003.
APA Xiaochen Liu;Lihao Wang;Yinfang Zhu;Junyuan Zhao;Jinying Zhang;Jinling Yang;Fuhua Yang.(2018).A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing.Journal of Micromechanics & Microengineering,28(11),115003.
MLA Xiaochen Liu;Lihao Wang;Yinfang Zhu;Junyuan Zhao;Jinying Zhang;Jinling Yang;Fuhua Yang."A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing".Journal of Micromechanics & Microengineering 28.11(2018):115003.
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