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title: 制备低温超薄异质外延用柔性衬底的方法
author: 张志成;  杨少延;  黎大兵;  陈涌海;  朱勤生;  王占国
metadata_47: 2004-3-24
Appears in Collections:半导体研究所机构知识库_专利

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张志成;杨少延;黎大兵;陈涌海;朱勤生;王占国,制备低温超薄异质外延用柔性衬底的方法 ,CN02142452.7,20020919
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