SEMI OpenIR  > 半导体集成技术工程研究中心
氮化铝MEMS面内伸缩模态谐振器(CMR)的研究
侯云虹
Subtype硕士
Thesis Advisor宁瑾
2017-05-27
Degree Grantor中国科学院大学
Place of Conferral北京
Degree Discipline微电子学与固体电子学
Subject Area半导体器件
Date Available2017-06-01
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/28168
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
侯云虹. 氮化铝MEMS面内伸缩模态谐振器(CMR)的研究[D]. 北京. 中国科学院大学,2017.
Files in This Item:
File Name/Size DocType Version Access License
毕业论文-侯云虹 -终稿.pdf(2817KB) 限制开放LicenseApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[侯云虹]'s Articles
Baidu academic
Similar articles in Baidu academic
[侯云虹]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[侯云虹]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.