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Parylene 膜对半导体激光器性能的影响
井红旗; 赵懿昊; 吴霞; 王鑫; 刘素平; 马骁宇
2016
Source Publication半导体技术
Volume41Issue:3Pages:204-209
Subject Area半导体器件
Indexed BySCI
Date Available2017-03-16
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/27958
Collection光电子器件国家工程中心
Recommended Citation
GB/T 7714
井红旗,赵懿昊,吴霞,等. Parylene 膜对半导体激光器性能的影响[J]. 半导体技术,2016,41(3):204-209.
APA 井红旗,赵懿昊,吴霞,王鑫,刘素平,&马骁宇.(2016).Parylene 膜对半导体激光器性能的影响.半导体技术,41(3),204-209.
MLA 井红旗,et al."Parylene 膜对半导体激光器性能的影响".半导体技术 41.3(2016):204-209.
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