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Kinetic-limited etching of magnesium doping nitrogen polar GaN in potassium hydroxide solution
Junyan Jiang; Yuantao Zhang; Chen Chi; Fan Yang; Pengchong Li; Degang Zhao; Baolin Zhang; Guotong Du
2016
Source PublicationApplied Surface Science
Volume360Pages:772-776
Subject Area光电子学
Indexed BySCI
Date Available2017-03-10
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/27869
Collection光电子研究发展中心
Recommended Citation
GB/T 7714
Junyan Jiang,Yuantao Zhang,Chen Chi,et al. Kinetic-limited etching of magnesium doping nitrogen polar GaN in potassium hydroxide solution[J]. Applied Surface Science,2016,360:772-776.
APA Junyan Jiang.,Yuantao Zhang.,Chen Chi.,Fan Yang.,Pengchong Li.,...&Guotong Du.(2016).Kinetic-limited etching of magnesium doping nitrogen polar GaN in potassium hydroxide solution.Applied Surface Science,360,772-776.
MLA Junyan Jiang,et al."Kinetic-limited etching of magnesium doping nitrogen polar GaN in potassium hydroxide solution".Applied Surface Science 360(2016):772-776.
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