| Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering | |
| Tianwei Zhou; Yuhua Zuo; Kai Qiu; Jun Zheng; Qiming Wang | |
| 2016 | |
| Source Publication | Vacuum
 |
| Volume | 125Pages:93-97 |
| Subject Area | 光电子学 |
| Indexed By | SCI |
| Date Available | 2017-03-10 |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/27812 |
| Collection | 光电子研究发展中心 |
| Recommended Citation GB/T 7714 | Tianwei Zhou,Yuhua Zuo,Kai Qiu,et al. Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering[J]. Vacuum,2016,125:93-97. |
| APA | Tianwei Zhou,Yuhua Zuo,Kai Qiu,Jun Zheng,&Qiming Wang.(2016).Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering.Vacuum,125,93-97. |
| MLA | Tianwei Zhou,et al."Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering".Vacuum 125(2016):93-97. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| Influence of hydroge（528KB） | 限制开放 | License | Application Full Text | |||
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