Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering | |
Tianwei Zhou; Yuhua Zuo; Kai Qiu; Jun Zheng; Qiming Wang | |
2016 | |
Source Publication | Vacuum
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Volume | 125Pages:93-97 |
Subject Area | 光电子学 |
Indexed By | SCI |
Date Available | 2017-03-10 |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/27812 |
Collection | 光电子研究发展中心 |
Recommended Citation GB/T 7714 | Tianwei Zhou,Yuhua Zuo,Kai Qiu,et al. Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering[J]. Vacuum,2016,125:93-97. |
APA | Tianwei Zhou,Yuhua Zuo,Kai Qiu,Jun Zheng,&Qiming Wang.(2016).Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering.Vacuum,125,93-97. |
MLA | Tianwei Zhou,et al."Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering".Vacuum 125(2016):93-97. |
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