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一种氮化物外延装置及方法
张硕; 段瑞飞; 曾一平; 王军喜; 李晋闽
Rights Holder中国科学院半导体所
Date Available2016-09-28
Country中国
Subtype发明
Subject Area半导体器件
Application Date2015-01-06
Application NumberCN201510005154.4
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27624
Collection中科院半导体照明研发中心
Recommended Citation
GB/T 7714
张硕,段瑞飞,曾一平,等. 一种氮化物外延装置及方法.
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