SEMI OpenIR  > 中科院半导体材料科学重点实验室
制备高选择比量子级联激光器脊波导结构的湿法腐蚀方法
梁平; 刘峰奇; 张锦川; 闫方亮; 胡颖; 王利军; 刘俊岐; 王占国
Rights Holder中国科学院半导体所
Date Available2016-09-22
Country中国
Subtype发明
Subject Area半导体材料
Application Date2015-06-15
Application NumberCN201510329218.6
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27546
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
梁平,刘峰奇,张锦川,等. 制备高选择比量子级联激光器脊波导结构的湿法腐蚀方法.
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制备高选择比量子级联激光器脊波导结构的湿(334KB) 限制开放LicenseApplication Full Text
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