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基于SOI衬底的横向纳米线叉指结构晶体管及制备方法
洪文婷; 韩伟华; 吕奇峰; 杨富华
Rights Holder中国科学院半导体所
Date Available2016-09-22
Country中国
Subtype发明
Subject Area微电子学
Application Date2015-05-14
Application NumberCN201510245793.8
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27499
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
洪文婷,韩伟华,吕奇峰,等. 基于SOI衬底的横向纳米线叉指结构晶体管及制备方法.
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