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title: 磁控溅射靶的制造方法及该方法使用的模具
author: 尹志岗;  杨霏;  陈诺夫;  吴金良;  柴春林
metadata_47: 2005-1-26
Appears in Collections:半导体研究所机构知识库_专利

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Recommended Citation:
尹志岗;杨霏;陈诺夫;吴金良;柴春林,磁控溅射靶的制造方法及该方法使用的模具 ,CN03147652.X,20030715
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