光弹调制测量系统 | |
张宏毅; 陈涌海; 高寒松 | |
Rights Holder | 中国科学院半导体所 |
Date Available | 2016-08-30 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 半导体材料 |
Application Date | 2014-12-25 |
Application Number | CN201410821124.6 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/27242 |
Collection | 中科院半导体材料科学重点实验室 |
Recommended Citation GB/T 7714 | 张宏毅,陈涌海,高寒松. 光弹调制测量系统. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
光弹调制测量系统.pdf(424KB) | 限制开放 | License | Application Full Text |
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