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Dielectric microwave properties of Si-integrated pulsed laser deposited (Ba, Sr)TiO3 thin films up to 110 GHz
Xi Ning; Shuming Chen; Jinying Zhang; Hui Huang; Lei Wang
2015
Source PublicationApplied Physics Letters
Volume107Pages:052905
Subject Area微电子学
Indexed BySCI
Date Available2016-04-08
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26983
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Xi Ning,Shuming Chen,Jinying Zhang,et al. Dielectric microwave properties of Si-integrated pulsed laser deposited (Ba, Sr)TiO3 thin films up to 110 GHz[J]. Applied Physics Letters,2015,107:052905.
APA Xi Ning,Shuming Chen,Jinying Zhang,Hui Huang,&Lei Wang.(2015).Dielectric microwave properties of Si-integrated pulsed laser deposited (Ba, Sr)TiO3 thin films up to 110 GHz.Applied Physics Letters,107,052905.
MLA Xi Ning,et al."Dielectric microwave properties of Si-integrated pulsed laser deposited (Ba, Sr)TiO3 thin films up to 110 GHz".Applied Physics Letters 107(2015):052905.
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