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A novel MEMS electromagnetic actuator with large displacement
Xingdong Lv; Weiwei Wei; Xu Mao; Yu Chen; Jinling Yang; Fuhua Yang
2015
Source PublicationSensors and Actuators A: Physical
Volume221Pages:22–28
Subject Area微电子学
Indexed BySCI
Language英语
Date Available2016-04-08
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26981
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Xingdong Lv,Weiwei Wei,Xu Mao,et al. A novel MEMS electromagnetic actuator with large displacement[J]. Sensors and Actuators A: Physical,2015,221:22–28.
APA Xingdong Lv,Weiwei Wei,Xu Mao,Yu Chen,Jinling Yang,&Fuhua Yang.(2015).A novel MEMS electromagnetic actuator with large displacement.Sensors and Actuators A: Physical,221,22–28.
MLA Xingdong Lv,et al."A novel MEMS electromagnetic actuator with large displacement".Sensors and Actuators A: Physical 221(2015):22–28.
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