A novel MEMS actuator with large lateral stroke driven by Lorentz force | |
Xingdong Lv; Weiwei Wei; Xu Mao; Jinling Yang; Fuhua Yang | |
2015 | |
Source Publication | Journal of Micromechanics and Microengineering
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Volume | 25Pages:025009 |
Subject Area | 微电子学 |
Indexed By | SCI |
Language | 英语 |
Date Available | 2016-04-08 |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/26980 |
Collection | 半导体集成技术工程研究中心 |
Recommended Citation GB/T 7714 | Xingdong Lv,Weiwei Wei,Xu Mao,et al. A novel MEMS actuator with large lateral stroke driven by Lorentz force[J]. Journal of Micromechanics and Microengineering,2015,25:025009. |
APA | Xingdong Lv,Weiwei Wei,Xu Mao,Jinling Yang,&Fuhua Yang.(2015).A novel MEMS actuator with large lateral stroke driven by Lorentz force.Journal of Micromechanics and Microengineering,25,025009. |
MLA | Xingdong Lv,et al."A novel MEMS actuator with large lateral stroke driven by Lorentz force".Journal of Micromechanics and Microengineering 25(2015):025009. |
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