| A novel MEMS actuator with large lateral stroke driven by Lorentz force | |
| Xingdong Lv; Weiwei Wei; Xu Mao; Jinling Yang; Fuhua Yang | |
| 2015 | |
| Source Publication | Journal of Micromechanics and Microengineering
 |
| Volume | 25Pages:025009 |
| Subject Area | 微电子学 |
| Indexed By | SCI |
| Language | 英语 |
| Date Available | 2016-04-08 |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/26980 |
| Collection | 半导体集成技术工程研究中心 |
| Recommended Citation GB/T 7714 | Xingdong Lv,Weiwei Wei,Xu Mao,et al. A novel MEMS actuator with large lateral stroke driven by Lorentz force[J]. Journal of Micromechanics and Microengineering,2015,25:025009. |
| APA | Xingdong Lv,Weiwei Wei,Xu Mao,Jinling Yang,&Fuhua Yang.(2015).A novel MEMS actuator with large lateral stroke driven by Lorentz force.Journal of Micromechanics and Microengineering,25,025009. |
| MLA | Xingdong Lv,et al."A novel MEMS actuator with large lateral stroke driven by Lorentz force".Journal of Micromechanics and Microengineering 25(2015):025009. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| A novel MEMS actuato（1392KB） | 限制开放 | License | Application Full Text | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment