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A novel MEMS actuator with large lateral stroke driven by Lorentz force
Xingdong Lv; Weiwei Wei; Xu Mao; Jinling Yang; Fuhua Yang
2015
Source PublicationJournal of Micromechanics and Microengineering
Volume25Pages:025009
Subject Area微电子学
Indexed BySCI
Language英语
Date Available2016-04-08
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26980
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Xingdong Lv,Weiwei Wei,Xu Mao,et al. A novel MEMS actuator with large lateral stroke driven by Lorentz force[J]. Journal of Micromechanics and Microengineering,2015,25:025009.
APA Xingdong Lv,Weiwei Wei,Xu Mao,Jinling Yang,&Fuhua Yang.(2015).A novel MEMS actuator with large lateral stroke driven by Lorentz force.Journal of Micromechanics and Microengineering,25,025009.
MLA Xingdong Lv,et al."A novel MEMS actuator with large lateral stroke driven by Lorentz force".Journal of Micromechanics and Microengineering 25(2015):025009.
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