Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering | |
Tianwei Zhou; Yuhua Zuo; Kai Qiu; Jun Zheng; Qiming Wang | |
2015 | |
Source Publication | Vacuum
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Volume | 125Pages:93-97 |
Subject Area | 光电子学 |
Indexed By | SCI |
Language | 英语 |
Date Available | 2016-03-22 |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/26688 |
Collection | 光电子研究发展中心 |
Recommended Citation GB/T 7714 | Tianwei Zhou,Yuhua Zuo,Kai Qiu,et al. Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering[J]. Vacuum,2015,125:93-97. |
APA | Tianwei Zhou,Yuhua Zuo,Kai Qiu,Jun Zheng,&Qiming Wang.(2015).Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering.Vacuum,125,93-97. |
MLA | Tianwei Zhou,et al."Influence of hydrogen on the properties of titanium doped hydrogenated amorphous silicon prepared by sputtering".Vacuum 125(2015):93-97. |
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