Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process | |
Zan Zhang; Beiju Huang; Xu Zhang; Zanyun Zhang; Chuantong Cheng; Xurui Mao; Sijie Liu; Hongda Chen | |
2015 | |
Source Publication | IEEE Photonics Technology Letters
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Volume | 27Issue:14Pages:1543-1546 |
Subject Area | 光电子学 |
Indexed By | SCI |
Language | 英语 |
Date Available | 2016-03-22 |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/26662 |
Collection | 光电子研究发展中心 |
Recommended Citation GB/T 7714 | Zan Zhang,Beiju Huang,Xu Zhang,et al. Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process[J]. IEEE Photonics Technology Letters,2015,27(14):1543-1546. |
APA | Zan Zhang.,Beiju Huang.,Xu Zhang.,Zanyun Zhang.,Chuantong Cheng.,...&Hongda Chen.(2015).Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process.IEEE Photonics Technology Letters,27(14),1543-1546. |
MLA | Zan Zhang,et al."Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process".IEEE Photonics Technology Letters 27.14(2015):1543-1546. |
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