| Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process | |
| Zan Zhang; Beiju Huang; Xu Zhang; Zanyun Zhang; Chuantong Cheng; Xurui Mao; Sijie Liu; Hongda Chen | |
| 2015 | |
| Source Publication | IEEE Photonics Technology Letters
 |
| Volume | 27Issue:14Pages:1543-1546 |
| Subject Area | 光电子学 |
| Indexed By | SCI |
| Language | 英语 |
| Date Available | 2016-03-22 |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/26662 |
| Collection | 光电子研究发展中心 |
| Recommended Citation GB/T 7714 | Zan Zhang,Beiju Huang,Xu Zhang,et al. Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process[J]. IEEE Photonics Technology Letters,2015,27(14):1543-1546. |
| APA | Zan Zhang.,Beiju Huang.,Xu Zhang.,Zanyun Zhang.,Chuantong Cheng.,...&Hongda Chen.(2015).Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process.IEEE Photonics Technology Letters,27(14),1543-1546. |
| MLA | Zan Zhang,et al."Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process".IEEE Photonics Technology Letters 27.14(2015):1543-1546. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| Monolithic Integrati（1224KB） | 限制开放 | License | Application Full Text | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment