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Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process
Zan Zhang; Beiju Huang; Xu Zhang; Zanyun Zhang; Chuantong Cheng; Xurui Mao; Sijie Liu; Hongda Chen
2015
Source PublicationIEEE Photonics Technology Letters
Volume27Issue:14Pages:1543-1546
Subject Area光电子学
Indexed BySCI
Language英语
Date Available2016-03-22
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26662
Collection光电子研究发展中心
Recommended Citation
GB/T 7714
Zan Zhang,Beiju Huang,Xu Zhang,et al. Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process[J]. IEEE Photonics Technology Letters,2015,27(14):1543-1546.
APA Zan Zhang.,Beiju Huang.,Xu Zhang.,Zanyun Zhang.,Chuantong Cheng.,...&Hongda Chen.(2015).Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process.IEEE Photonics Technology Letters,27(14),1543-1546.
MLA Zan Zhang,et al."Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process".IEEE Photonics Technology Letters 27.14(2015):1543-1546.
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