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Inhibitation of Si-Ge interdiffusion in Ge-on-insulator structures formed by rapid melt growth
J.J.Wen; Z. Liu; T.W. Zhou; C.L. Xue; Y.H. Zuo; C.B. Li; Q.M. Wang; B.W. Cheng
2015
Source PublicationTHIN SOLID FILMS
Volume586Pages:54-57
Subject Area光电子学
Indexed BySCI
Language英语
Date Available2016-03-22
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26646
Collection光电子研究发展中心
Recommended Citation
GB/T 7714
J.J.Wen,Z. Liu,T.W. Zhou,et al. Inhibitation of Si-Ge interdiffusion in Ge-on-insulator structures formed by rapid melt growth[J]. THIN SOLID FILMS,2015,586:54-57.
APA J.J.Wen.,Z. Liu.,T.W. Zhou.,C.L. Xue.,Y.H. Zuo.,...&B.W. Cheng.(2015).Inhibitation of Si-Ge interdiffusion in Ge-on-insulator structures formed by rapid melt growth.THIN SOLID FILMS,586,54-57.
MLA J.J.Wen,et al."Inhibitation of Si-Ge interdiffusion in Ge-on-insulator structures formed by rapid melt growth".THIN SOLID FILMS 586(2015):54-57.
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