SEMI OpenIR  > 半导体集成技术工程研究中心
GaN基SBD功率器件研究进展
李迪
2014-05
Source Publication微纳电子技术
Volume51Issue:5
Keyword氮化镓 肖特基势垒二极管 功率器件 肖特基金属 漏电流 等离子体处理
Date Available2015-05-29
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26497
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
李迪. GaN基SBD功率器件研究进展[J]. 微纳电子技术,2014,51(5).
APA 李迪.(2014).GaN基SBD功率器件研究进展.微纳电子技术,51(5).
MLA 李迪."GaN基SBD功率器件研究进展".微纳电子技术 51.5(2014).
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