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Damage of Cr film by oxygen plasma
Wei, WW; Zhu, YF; Yang, JL; Yang, FH
2014
Source PublicationAPPLIED SURFACE SCIENCE
Volume301Issue:SIPages:539-543
Subject Area微电子学
Indexed BySCI
Language英语
Date Available2015-04-02
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26294
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Wei, WW,Zhu, YF,Yang, JL,et al. Damage of Cr film by oxygen plasma[J]. APPLIED SURFACE SCIENCE,2014,301(SI):539-543.
APA Wei, WW,Zhu, YF,Yang, JL,&Yang, FH.(2014).Damage of Cr film by oxygen plasma.APPLIED SURFACE SCIENCE,301(SI),539-543.
MLA Wei, WW,et al."Damage of Cr film by oxygen plasma".APPLIED SURFACE SCIENCE 301.SI(2014):539-543.
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