| Effect of high-temperature annealing on AlN thin film grown by metalorganic chemical | |
| Wang, WY; Jin, P; Liu, GP; Li, W; Liu, B; Liu, XF; Wang, ZG | |
| 2014 | |
| Source Publication | CHINESE PHYSICS B
 |
| Volume | 23Issue:8Pages:087810 |
| Subject Area | 半导体材料 |
| Indexed By | SCI |
| Language | 英语 |
| Date Available | 2015-03-25 |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/26246 |
| Collection | 中科院半导体材料科学重点实验室 |
| Recommended Citation GB/T 7714 | Wang, WY,Jin, P,Liu, GP,et al. Effect of high-temperature annealing on AlN thin film grown by metalorganic chemical[J]. CHINESE PHYSICS B,2014,23(8):087810. |
| APA | Wang, WY.,Jin, P.,Liu, GP.,Li, W.,Liu, B.,...&Wang, ZG.(2014).Effect of high-temperature annealing on AlN thin film grown by metalorganic chemical.CHINESE PHYSICS B,23(8),087810. |
| MLA | Wang, WY,et al."Effect of high-temperature annealing on AlN thin film grown by metalorganic chemical".CHINESE PHYSICS B 23.8(2014):087810. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| Effect of high-tempe（741KB） | 限制开放 | License | Application Full Text | |||
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