| An ultrabroad band omni-directional anti-reflective coating with quasi-gradient refractive index distribution based on Si-SiOxNy-SiO2 materials system | |
| Qiu, WB; Ma, YH; Zhao, J; Wang, JX; Li, MK; Li, SY; Pan, JQ | |
| 2014 | |
| Source Publication | JAPANESE JOURNAL OF APPLIED PHYSICS
 |
| Volume | 53Issue:2Pages:021501 |
| Subject Area | 半导体材料 |
| Indexed By | SCI |
| Language | 英语 |
| Date Available | 2015-03-25 |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/26145 |
| Collection | 中科院半导体材料科学重点实验室 |
| Recommended Citation GB/T 7714 | Qiu, WB,Ma, YH,Zhao, J,et al. An ultrabroad band omni-directional anti-reflective coating with quasi-gradient refractive index distribution based on Si-SiOxNy-SiO2 materials system[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2014,53(2):021501. |
| APA | Qiu, WB.,Ma, YH.,Zhao, J.,Wang, JX.,Li, MK.,...&Pan, JQ.(2014).An ultrabroad band omni-directional anti-reflective coating with quasi-gradient refractive index distribution based on Si-SiOxNy-SiO2 materials system.JAPANESE JOURNAL OF APPLIED PHYSICS,53(2),021501. |
| MLA | Qiu, WB,et al."An ultrabroad band omni-directional anti-reflective coating with quasi-gradient refractive index distribution based on Si-SiOxNy-SiO2 materials system".JAPANESE JOURNAL OF APPLIED PHYSICS 53.2(2014):021501. |
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| File Name/Size | DocType | Version | Access | License | ||
| An ultrabroad band o（932KB） | 限制开放 | License | Application Full Text | |||
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