SEMI OpenIR  > 中科院半导体材料科学重点实验室
An ultrabroad band omni-directional anti-reflective coating with quasi-gradient refractive index distribution based on Si-SiOxNy-SiO2 materials system
Qiu, WB; Ma, YH; Zhao, J; Wang, JX; Li, MK; Li, SY; Pan, JQ
2014
Source PublicationJAPANESE JOURNAL OF APPLIED PHYSICS
Volume53Issue:2Pages:021501
Subject Area半导体材料
Indexed BySCI
Language英语
Date Available2015-03-25
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26145
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
Qiu, WB,Ma, YH,Zhao, J,et al. An ultrabroad band omni-directional anti-reflective coating with quasi-gradient refractive index distribution based on Si-SiOxNy-SiO2 materials system[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2014,53(2):021501.
APA Qiu, WB.,Ma, YH.,Zhao, J.,Wang, JX.,Li, MK.,...&Pan, JQ.(2014).An ultrabroad band omni-directional anti-reflective coating with quasi-gradient refractive index distribution based on Si-SiOxNy-SiO2 materials system.JAPANESE JOURNAL OF APPLIED PHYSICS,53(2),021501.
MLA Qiu, WB,et al."An ultrabroad band omni-directional anti-reflective coating with quasi-gradient refractive index distribution based on Si-SiOxNy-SiO2 materials system".JAPANESE JOURNAL OF APPLIED PHYSICS 53.2(2014):021501.
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