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Effective n-type doping strategy through codoping Si-Al-F-N in aluminum nitride
Wang, Zhiguo; Li, Jingbo; Fu, Yong Qing
2014
Source PublicationAPPLIED PHYSICS EXPRESS
Volume7Issue:11Pages:111004
Subject Area半导体物理
Indexed BySCI
Language英语
Date Available2015-03-20
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26087
Collection半导体超晶格国家重点实验室
Recommended Citation
GB/T 7714
Wang, Zhiguo,Li, Jingbo,Fu, Yong Qing. Effective n-type doping strategy through codoping Si-Al-F-N in aluminum nitride[J]. APPLIED PHYSICS EXPRESS,2014,7(11):111004.
APA Wang, Zhiguo,Li, Jingbo,&Fu, Yong Qing.(2014).Effective n-type doping strategy through codoping Si-Al-F-N in aluminum nitride.APPLIED PHYSICS EXPRESS,7(11),111004.
MLA Wang, Zhiguo,et al."Effective n-type doping strategy through codoping Si-Al-F-N in aluminum nitride".APPLIED PHYSICS EXPRESS 7.11(2014):111004.
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