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一种硅神经电极混合集成器件的制造方法
张旭; 韩建强; 刘鸣; 裴为华; 陈弘达
Rights Holder中国科学院半导体研究所
Date Available2014-04-30
Country中国
Subtype发明
Subject Area光电子学
Application Date2014-01-21
Application NumberCN201410028793.8
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25901
Collection光电子研究发展中心
Recommended Citation
GB/T 7714
张旭,韩建强,刘鸣,等. 一种硅神经电极混合集成器件的制造方法.
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