SEMI OpenIR  > 中科院半导体照明研发中心
用于金属有机化学气相沉积设备的反应室进气装置
冉军学; 胡强; 胡国新; 梁勇; 熊衍凯; 王军喜; 曾一平; 李晋闽
Rights Holder中国科学院半导体研究所
Date Available2013-05-01
Country中国
Subtype发明
Subject Area半导体器件
Application Date2013-01-10
Application NumberCN201310010357.3
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25851
Collection中科院半导体照明研发中心
Recommended Citation
GB/T 7714
冉军学,胡强,胡国新,等. 用于金属有机化学气相沉积设备的反应室进气装置.
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