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InSb晶片与Si晶片键合的方法
彭红玲; 郑婉华
Rights Holder中国科学院半导体研究所
Date Available2013-07-10
Country中国
Subtype发明
Subject Area光电子学
Application Date2013-03-29
Application NumberCN201310109012.3
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25609
Collection光电子研究发展中心
Recommended Citation
GB/T 7714
彭红玲,郑婉华. InSb晶片与Si晶片键合的方法.
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InSb晶片与Si晶片键合的方法.pdf(375KB) 限制开放LicenseApplication Full Text
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