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一种微机械谐振器及其制作方法
杨晋玲; 赵晖; 骆伟; 袁泉; 杨富华
Rights Holder中国科学院半导体研究所
Date Available2013-09-04
Country中国
Subtype发明
Subject Area微电子学
Application Date2013-06-14
Application NumberCN201310235167.1
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25579
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
杨晋玲,赵晖,骆伟,等. 一种微机械谐振器及其制作方法.
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