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一种氮化镓基外延膜的选区激光剥离方法
梁萌; 杨华; 刘志强; 郭恩卿; 伊晓燕; 王军喜; 王国宏; 李晋闽
Rights Holder中国科学院半导体研究所
Date Available2014-04-02
Country中国
Subtype发明
Subject Area半导体器件
Application Date2013-12-20
Application NumberCN201310713492.4
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25409
Collection中科院半导体照明研发中心
Recommended Citation
GB/T 7714
梁萌,杨华,刘志强,等. 一种氮化镓基外延膜的选区激光剥离方法.
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