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一种频率可切换的微机械谐振器及其制备方法
赵晖; 杨晋玲; 杨富华
Rights Holder中国科学院半导体研究所
Date Available2014-04-30
Country中国
Subtype发明
Subject Area微电子学
Application Date2013-12-31
Application NumberCN201310750721.X
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25387
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
赵晖,杨晋玲,杨富华. 一种频率可切换的微机械谐振器及其制备方法.
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