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基于微纳操作臂的多自由度近场光学显微镜
王瑞; 谢亮; 祝宁华
Rights Holder中国科学院半导体研究所
Date Available2012-09-12
Country中国
Subtype发明
Subject Area光电子学
Application Date2012-04-20
Application NumberCN201210119169.X
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25300
Collection光电子研究发展中心
Recommended Citation
GB/T 7714
王瑞,谢亮,祝宁华. 基于微纳操作臂的多自由度近场光学显微镜.
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